December 13, 2012

Nanometrics Announces Passing of Founder Vincent J. Coates

MILPITAS, Calif., Dec. 13, 2012 (GLOBE NEWSWIRE) -- Nanometrics Incorporated (Nasdaq:NANO), a leading provider of advanced process control metrology and inspection systems, today announced that Founder Vincent J. Coates passed away Tuesday evening at his Palo Alto home at the age of 87.

Mr. Coates founded Nanometrics in 1975, and in his tenure developed multiple successful product lines, was awarded more than 20 U.S. patents, and grew Nanometrics into an important metrology and process control company for the worldwide semiconductor industry. Mr. Coates served as the company's Chief Executive Officer from 1975 until 1998 and as Chairman of the Board from 1975 until 2007.  In 1995, SEMI recognized Mr. Coates with a lifetime achievement award for his pioneering work in Scanning Electron Microscopy.

"Vince was a remarkable entrepreneur and true visionary in the industry," commented Bruce Rhine, Chairman. "His pioneering work in metrology and scientific instruments played a key role in the development and production of integrated circuits and other solid state devices. His contributions to the success of Nanometrics and the industry as a whole are innumerable. He is survived by wife Stella, three children and four grandchildren, all of whom are in our thoughts as we say goodbye to a man who will be greatly missed."

About Nanometrics

Nanometrics is a leading provider of advanced, high-performance process control metrology and inspection systems used primarily in the fabrication of semiconductors, high-brightness LEDs, data storage devices and solar photovoltaics. Nanometrics' automated and integrated systems address numerous process control applications, including critical dimension and film thickness measurement, device topography, defect inspection, overlay registration, and analysis of various other film properties such as optical, electrical and material characteristics. The company's process control solutions are deployed throughout the fabrication process, from front-end-of-line substrate manufacturing, to high-volume production of semiconductors and other devices, to advanced wafer-scale packaging applications. Nanometrics' systems enable device manufacturers to improve yields, increase productivity and lower their manufacturing costs. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Select Market under the symbol NANO. Nanometrics' website is http://www.nanometrics.com.

The Nanometrics Incorporated logo is available at http://www.globenewswire.com/newsroom/prs/?pkgid=14865

CONTACT: Investor Relations Contact:

         Claire McAdams

         Headgate Partners LLC

         530.265.9899

         claire@headgatepartners.com



         Company Contact:

         Ronald Kisling

         CFO

         408.545.6143

         rkisling@nanometrics.com

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Source: Nanometrics Incorporated

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